He (5N)

Purity
  • ≥ 99.999% (5N)
Package
  • 47L Cylinder、47L*16 Cylinder Bundle、Tube Trailer
Filling 
  • 8.3Sm3、132.8Sm3、4000Sm3
Product details

Chemical name : Helium
Chemical formula : He (SDS)
CAS.NO： 7440-59-7
MW : 4.0026  g/mol
Melting point : -272.2 ℃ 
Boiling point : -268.94 ℃

Semiconductor applications

Helium (He) plays a multifaceted role in the semiconductor industry, particularly in areas such as cooling, plasma etching, surface cleaning, atmosphere control, and photolithography. Its inert nature, low density, and cryogenic properties make it an indispensable gas in semiconductor manufacturing. Helium is not only used for cooling and gas transport but also ensures stable environments for precise semiconductor processing. Its role in cooling systems, plasma etching, and precise atmosphere control contributes to efficient and accurate process control, making it essential for high-quality semiconductor production.

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