Excimer Laser Gases

Product

Spec

Package

10PPMXe/3.5%Ar/Ne Mixture

5N/6N/5N

49L

0.95%F2/1.25%Kr/Ne Mixture

3N/5N/5N

49L

1.25%Kr/Ne Mixture

5N/5N

49L

0.95%F2/3.5%Ar/Ne

3N/6N/5N

49L

Semiconductor applications

Excimer Laser Gases are integral to semiconductor manufacturing, especially in lithography, laser etching, material processing, and thin film deposition. The ability of excimer lasers to produce precise, high-energy ultraviolet light enables the creation of advanced semiconductor devices with fine patterns and high-density circuits. As semiconductor technology advances towards smaller nodes and more complex designs, the role of excimer lasers will continue to be vital in achieving the necessary precision and performance.

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