Excimer Laser Gases
Product |
Spec |
Package |
10PPMXe/3.5%Ar/Ne Mixture |
5N/6N/5N |
49L |
0.95%F2/1.25%Kr/Ne Mixture |
3N/5N/5N |
49L |
1.25%Kr/Ne Mixture |
5N/5N |
49L |
0.95%F2/3.5%Ar/Ne |
3N/6N/5N |
49L |
Semiconductor applications
Excimer Laser Gases are integral to semiconductor manufacturing, especially in lithography, laser etching, material processing, and thin film deposition. The ability of excimer lasers to produce precise, high-energy ultraviolet light enables the creation of advanced semiconductor devices with fine patterns and high-density circuits. As semiconductor technology advances towards smaller nodes and more complex designs, the role of excimer lasers will continue to be vital in achieving the necessary precision and performance.
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