CH3F (5N)

Purity
  • ≥ 99.999% (5N)
Package
  • 47L
Net weight
  • 15KG
Product details

Chemical name : Methyl Fluoride
Chemical formula : CH3F (SDS)
CAS.NO： 593-53-3
MW :  34 g/mol
Vapor pressure : 33 bar@20℃  
Melting point : -142 ℃
Boiling point : -77.5℃

Semiconductor applications

CH3F is primarily used in the semiconductor industry for etching, chemical vapor deposition, gas mixtures, and surface treatment. Due to its selectivity and low contamination characteristics, CH3F is a valuable gas source in semiconductor processing, especially for fine machining and high-precision control.

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