C4F6 (4N5)

Purity
  • ≥ 99.995% (4N5)
Package
  • 47L
Net weight
  • 45KG
Product details

Chemical name : Hexafluoro-1,3-butadiene
Chemical formula : C4F6 (SDS)
CAS.NO： 685-63-2
MW : 162.03 g/mol
Vapor pressure : 0.8 bar@20℃
Melting point : -132℃
Boiling point : 6-7 ℃

Semiconductor applications

C4F6 is primarily used in the semiconductor industry for etching processes, especially in plasma etching for microfabrication. Its chemical properties make it suitable for high-precision manufacturing, and it is considered a more environmentally conscious option compared to other fluorinated gases. However, managing its environmental impact remains a key consideration in its use.

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