Liquid Phase Delivery (LD)

Automation
  • 12” Color HMI
  • Industrial Standard PLC
Process
  • Supply multiple Process Chamber
Safety
  • Exhaust Ventilation
  • EMO
  • Over 100% Leak Containment
LD100 Liquid Dispense System with PFA Valve
System Features & Specifications
  • Seamless connection with incumbent tool bubbler for refilling demands 
  • PFA valve for all wetted path
  • C1D2 for Electrical / Fail safe automatic operation / Operation interlock for safe operation /Controller Z-Purge for C1D2
  • Top light tower for equipment status
  • EMO for emergency shutdown
  • Semi S2 certified
Application

  • DCE(Trans-LC), POCl3

LD200 Liquid Dispense System
System Features & Specifications
  • ALD & CVD precursors canister < 20L
  • Dual process tanks design for continuous precursor supply
  • C1D2 for Electrical / Fail safe automatic operation / Operation interlock for safe operation /Controller Z-Purge for C1D2
  • Top light tower for equipment status
  • EMO for emergency shutdown
  • Semi S2 certified
Application
  • TEOS, TEB, BDEAS, HCDS, ATRP, OMCTS, TMCTS, DIS, BTBAS, 4MS, DIPAS, TiCl4, TEPO, TMB, MDEOS, etc.
LD300 Liquid Dispense System for Bulk Source Canister
System Features & Specifications
  • For ALD & CVD precursors LDS process tank refill with Bulk source canister (> 20L) 
  • Single or Dual tanks design for continuous precursor supply
  • C1D2 for Electrical / Fail safe automatic operation / Operation interlock for safe operation /Controller Z-Purge for C1D2
  • Top light tower for equipment status
  • EMO for emergency shutdown
  • Semi S2 certified
Application
  • TEOS, MDEOS, ATRP, 4MS, TMA, TCS
LD400 High-k Precursors Delivery System with Solvent Purge
System Features & Specifications
  • LD400s can connect up to 4 LD400d
  • C1D2 for Electrical / Fail safe automatic operation / Operation interlock for safe operation /Controller Z-Purge for C1D2
  • Top light tower for equipment status
  • EMO for emergency shutdown
  • Semi S2 certified
LD400d High-k Precursors Dispense Unit
  • Dispense high-k precursor
  • Solvent purge for high-k precursor canister change out
  • Chamber solvent flush from LDS
LD400s Solvent Dispense and Waste Collection
  • Dispense solvent to LDS  for canister change out line cleaning
  • Receiving LDS and process chamber solvent flush waste 
Application Precursors
  •   TEMAZ / TEMAH / CpZr / CpHf / IPZ235
Application Solvent
  •   Octane / Hexane
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