Gas Phase Delivery (GD)

System Features & Specifications

• Supply Compressed & Liquid specialty gases
• Dual cylinder design for continuous supply
• C1D2 for Electrical / Fail safe automatic operation / Operation interlock for safe operation /Controller Z-Purge for C1D2
• Top light tower for equipment status
• EMO for emergency shutdown
• Semi S2 certified

Application

• HF, HBr, Cl2, CxFy, C3H6, CHF3, COS, DCS, WF6, SF6, AsH3, PH3, SO2, Si2H6, F2 mixture, GeH4 mixture, CO, CH4, C2H4, MMS mixture, H2 mixture, B2H6 mixture, NO, BCl3, SiH4, CF4, Inert mixtures

System Features & Specifications

• The designed flow rate from 50 slpm up tp 2000 slpm
• Safe handling of flammable / pyrophoric / toxic / oxidizing gases
• Source container with option of resistive / carbon fiber / inductive heating
• Real-Time J-T heater control based on gas types and flow conditions
• Certificate of IEXC for heater
• C1D2 for Electrical / Fail safe automatic operation / Operation interlock for safe operation /Controller Z-Purge for C1D2
• Top light tower for equipment status
• EMO for emergency shutdown
• Semi S2 certified

Application

• SiH4, NF3, NH3, N2O, PH3, CO2

System Features & Specifications

• The designed max flow rate is 6 slpm for sub-atmospheric gas
• Dual cylinder design for continuous supply
• Direct control of induction heating from main PLC
• Certificate of IEXC (IH heater)
• C1D2 for Electrical / Fail safe automatic operation / Operation interlock for safe operation /Controller Z-Purge for C1D2
• Top light tower for equipment status
• EMO for emergency shutdown
• Semi S2 certified

Application

• TSA and other ultra low sat’d vapor pressure gases

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